Sol-Gel Derived Lead Zirconate Titanate Thick Films and Their Improved Pyroelectric Properties
نویسندگان
چکیده
منابع مشابه
Residual stress effects on piezoelectric response of sol-gel derived lead zirconate titanate thin films
Piezoelectric properties of three sol-gel derived Pb Zr0.53Ti0.47 O3 thin film specimens of different thicknesses integrated onto Pt/Ti/SiO2 Si substrates are investigated to delineate the influence of residual stress on the strain-field response characteristics from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for films ranging in ...
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متن کاملResidual stress effects on piezoelectric response of sol-gel derived lead zirconate titatnate thin films
Piezoelectric properties of three sol-gel derived Pb Zr0.53Ti0.47 O3 thin film specimens of different thicknesses integrated onto Pt/Ti/SiO2 Si substrates are investigated to delineate the influence of residual stress on the strain-field response characteristics from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for films ranging in ...
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ژورنال
عنوان ژورنال: Integrated Ferroelectrics
سال: 2004
ISSN: 1058-4587,1607-8489
DOI: 10.1080/10584580490894348